Allen Cleanroom Expansion at nano@stanford
The Stanford Nanofabrication Facility (SNF) has long been the cornerstone of semiconductor and nanofabrication research at Stanford and Silicon Valley, serving over 600 users each year, serving Stanford, outside academic, industry, and government partners. As announced in the Stanford Report, the facility highlighted its ongoing role in advancing chip‑making technologies and its commitment to staying at the forefront of semiconductor research through continuous upgrades and collaboration with leading partners.
The Allen Building cleanroom builds on that legacy with a new expansion made possible by the School of Engineering and investment support from TSMC and the Pacific Northwest AI Hub of Microelectronics Commons. This project will provide new cleanroom space, flexible‑electronics fabrication capabilities, modernized offices, and essential ADA upgrades, thereby extending the facility’s capacity to support cutting‑edge research and broaden educational opportunities across the campus.
Scope of the Allen Expansion
Additonal 2500 sq ft cleanroom
Facilitated primarily for physical vapor deposition (PVD) and atomic layer deposition (ALD) nanofabrication tools, with space for at least 12 new tools.
Several PVD tools will be moved from the existing Allen cleanroom, freeing up space for future etch and PECVD tools
400 sq ft lab modification
Tailored for flexible‑electronics assembly fabrication with plans to relocate or procure 20 tools.
Office areas
Upgraded and modernized offices for faculty, staff, and student use.
ADA upgrades
Comprehensive improvements to three bathrooms and shower facilities to ensure accessibility.
Timeline
- June 2025 – Contractor bid process and design packages started
- Fall/Winter 2025 – Remodel of second floor office area
- Spring 2026 – Remodel of first floor office area
- Spring/Summer 2026 – Construction of PVD / ALD cleanrooms
- Summer/Fall 2026 – Remodel and upgrades to flexible electronics packaging lab 155A
