Courses @ Stanford
If you're interested in hardware and how it's made, here are some Stanford courses to help you get started. Some of these courses will get you into a bunnysuit into the lab. For more info, check out the Stanford Bulletin or ask an instructor or staffer.
Hands-On Courses with nano@stanford Instruments and Staff
The following courses offer students hands-on experience with nano@stanford instrumentation. Most are developed and taught by our expert staff, providing direct access to our tools and facilities.
The first part of the course will consist of a hands-on introduction to the techniques of micro and nanofabrication using Stanford’s shared nanotechnology research facilities, SNF and SNSF, complemented with field trips to local companies and other research centers to illustrate the many applications of nanotechnology, such as DNA microarrays, microfluidic bio-sensors, and microelectromechanical systems (MEMS). The second part involves students proposing, planning, and executing a project “to build something at the nanoscale.” Really, that is the criteria, “build something at the nanoscale.” The professors will of course enthusiastically aid in refining your projects and helping you realize them, but the initial spark will be from your creativity. With access to 10s of millions of dollars of nanotech equipment available to aid in realizing your vision, we hope you accept this challenge with gusto. Examples of recent projects include biosensors using aptamer probes, gecko-inspired dry adhesives, and ultrasensitive strain sensors using diffraction gratings.
Have you ever wondered what is inside your phone and your computer? What physical events happen in between the time you press the “search” button and the information shows up on the screen? What happens after you pressed the key to do a Google search? What are the advances in technology that made that happen? Can some of the same technologies be applied in various fields such as biomedical research and finding solutions to renewable energy?
In this course, we start with the classic paper by Richard Feynman, "There's Plenty of Room at the Bottom," which laid down a challenge to the nanotechnologists. Today’s microchips are nanotechnology in action. Transistors are nanometer scale. We will introduce students to the tools of nanotechnologists and the basic elements of nanoscale science and engineering such as nanotubes, nanowires, nanoparticles, and self-assembly. We will visit nanotechnology laboratories to consolidate our learning, go into the Stanford Nanofabrication Facility (SNF), and do a four-week project on nanofabrication. Hands-on laboratory work will be introduced (e.g., lithography, seeing things at the nanoscale using electron microscopes). We will learn how to build transistors from scratch and test them.
Students will develop an understanding of the scientific basis of nanotechnology and be exposed to nanotechnology from a broader societal perspective. Students will also be exposed to the latest research advances in nanotechnology that may have impact on daily life. Specifically, students will learn how microchips are made. Hands-on laboratory work will be introduced (e.g. lithography, seeing things at the nanoscale using electron microscopes).
Formerly EE 410. Fabrication, simulation, and testing of a submicron CMOS process. Practical aspects of IC fabrication including silicon wafer cleaning, photolithography, etching, oxidation, diffusion, ion implantation, chemical vapor deposition, physical sputtering, and electrical testing. Students also simulate the CMOS process using process simulator TSUPREM4 of the structures and electrical parameters that should result from the process flow. Taught in the Stanford Nanofabrication Facility (SNF). Preference to students pursuing doctoral research program requiring SNF facilities. Enrollment limited to 20. Prerequisites: EE 212, EE 216, or consent of instructor.
This project course focuses on developing fabrication processes for ExFab, a shared facility that supports flexible lithography, heterogeneous integration, and rapid micro prototyping. Team projects are approved by the instructor and are mentored by an SNF staff member and an external mentor from industry. Students will plan and execute experiments and document them in a final presentation and report, to be made available on the lab's Wiki for the benefit of the Stanford research community. Students must consult with Prof. Fan, SNF staff, and an external mentor, and also need to submit an approved proposal before signing up.
Experimental x-ray diffraction techniques for microstructural analysis of materials, emphasizing powder and single-crystal techniques. Diffraction from epitaxial and polycrystalline thin films, multilayers, and amorphorous materials using medium and high resolution configurations. Determination of phase purity, crystallinity, relaxation, stress, and texture in the materials. Advanced experimental x-ray diffraction techniques: reciprocal lattice mapping, reflectivity, and grazing incidence diffraction. Enrollment limited to 20. Undergraduates register for 162 for 4 units; graduates register for 172 for 3 units. Prerequisites: MATSCI 143 or equivalent course in materials characterization. Corequisites: MATSCI131 (Contact the instructor if you would like to enroll without completion of the stated prerequisites. A permission code will be provided with instructor approval)
Practical techniques in transmission electron microscopy (TEM): topics include microscope operation and alignment, diffraction modes and analysis, bright-field/dark-field imaging, high resolution and aberration corrected imaging, scanning TEM (STEM) imaging, x-ray energy dispersive spectrometry (EDS) and electron energy loss spectrometry (EELS) for compositional analysis and mapping. Prerequisite: 321, consent of instructor. Enrollment limited to 12.
Courses Supported by Our Staff
The following courses provide interaction with our facilities in a limited capacity, offering students exposure to our labs and instruments through guided tours, live demonstrations, expert talks from our staff, or similar observational experiences.
Students explore the use of nano@stanford facilities for physical analysis of material samples of interest for art conservation, technical art history and archaeology. Weekly demonstrations will be supplemented by lectures on intellectual context by Stanford faculty/staff and conservators from the Fine Arts Museums of San Francisco (FAMSF). Students will undertake analysis projects derived from ongoing conservation efforts at FAMSF, including training on the use of relevant nano@stanford instruments and data analysis.
Introduction to next-generation techniques in genetic, molecular, biochemical, and cellular engineering. Lab modules build upon current research including: gene and genome engineering via decoupled design and construction of genetic material; component engineering focusing on molecular design and quantitative analysis of experiments; device and system engineering using abstracted genetically encoded objects; and product development based on useful applications of biological technologies.
3D bioprinting promises engineered tissues with precise structure, composition, and cellular architecture. This biofabrication technology lies at the interface of biology, bioengineering, materials science, and instrumentation. This course will teach some of the latest technologies through fundamental lectures and hands-on 3D bioprinting workshops. Student groups will embark on independent projects to innovate in any aspect or application of 3D bioprinting hardware, wetware, or software. Experience in tissue engineering (BIOE260), instrumentation (BIOE123), or biomaterials (MATSCI 381) is helpful but not required.
The core objectives of the course will focus upon introducing and providing hands-on practice with analytical separation, spectroscopic identification, and calibrated quantification with strong technical communication (for the Writing-in-the-Major requirement) emphasized throughout the course. Lectures will focus on theory, and laboratory activities will provide hands-on practice with the GC, LC, XPS, ICP, MS, and UV/Vis instruments. Data analysis will be emphasized throughout the course with Python being the primary tool for plotting and computations. Statistical measurements will be introduced to gauge the quality and validity of data. Lectures will be three times a week with a required four-hour laboratory section. Prerequisites: CHEM 33 or CHEM 100; and CS 106A.
Use of spectroscopic instrumentation to obtain familiarity with important types of spectrometers and spectroscopic method and to apply them to study molecular properties and physical chemical time-dependent processes. Spectrometers include electronic ultraviolet/visible absorption, fluorescence, Raman, Fourier transform infrared, and nuclear magnetic resonance. Prerequisite: 173.
Second quarter of two-quarter sequence. Experimental aspects of chemical engineering. Emphasizes experimental design, project execution, team organization, and communication skills. Lab section times will not be assigned, though students should expect to spend at least 5 hours per week on average in the lab working on their team research projects. Labs will typically be available M-F between 9am-6pm; to be arranged separately. Prerequisite: CHEMENG 185A. Corequisite: CHEMENG 150.
This is the second course in a two-quarter sequence that focuses on critical thinking in experimental aspects of chemical engineering. Students will work in teams to prepare and revise project proposals with an emphasis on analyzing engineered systems to identify key unanswered questions. Students will develop and practice skills related to effective teamwork and communication. Prerequisite: CHEMENG 185A.
Polymer material design, synthesis, characterization, and application. Topics include organic and kinetic aspects of polymerization, polymer characterization techniques, and structure and properties of bulk polymers for commercial applications and emerging technologies.
The underpinnings of modern technology are the transistor (circuits), the capacitor (memory), and the solar cell (energy). EE 116 introduces the physics of their operation, their historical origins (including Nobel prize breakthroughs), and how they can be optimized for future applications. The class covers physical principles of semiconductors, including silicon and new material discoveries, quantum effects, band theory, operating principles, and device equations. Recommended (but not required) co-requisite: EE 65 or equivalent.
For students interested in the physical bases and practical methods of silicon VLSI chip fabrication, or the impact of technology on device and circuit design, or intending to pursue doctoral research involving the use of Stanford's Nanofabrication laboratory. Process simulators illustrate concepts. Topics: principles of integrated circuit fabrication processes, physical and chemical models for crystal growth, oxidation, ion implantation, etching, deposition, lithography, and back-end processing. Required for 410.
This course starts by covering the device physics and technology of current silicon power semiconductor devices including power MOSFETs, IGBTs, and Thyristors. Wide bandgap materials, especially GaN and SiC are potential replacements for Si power devices because of their fundamentally better properties. This course explores what is possible in these new materials, and what the remaining challenges are for wide bandgap materials to find widespread market acceptance in power applications. Future clean, renewable energy systems and high efficiency power control systems will critically depend on the higher performance devices possible in these new materials. Prerequisites: EE 116 or equivalent.
Fundamental aspects of CVD are initially considered, first focusing on processes occurring in the gas phase and then on those occurring on the surface. Qualitative understanding is emphasized, with minimal use of equations. Adding energy both thermally and by using a plasma is discussed; atomic-layer deposition is briefly considered. Examples of CVD equipment are examined. The second portion of the tutorial examines layers deposited by CVD. The focus is on group IV semiconductors especially epitaxial and heteroepitaxial deposition, in which the crystal structure of the depositing layer is related to that of the substrate. Polycrystalline silicon and the IC interconnect system are then discussed. Finally, the use of high-density plasmas for rapid gap filling is contrasted with alternative CVD dielectric deposition processes.
In modern VLSI technologies, device electrical characteristics are sensitive to structural details and therefore to fabrication techniques. How are advanced VLSI devices designed and what future changes are likely? What are the implications for device electrical performance caused by fabrication techniques? Physical models for nanometer scale structures, control of electrical characteristics (threshold voltage, short channel effects, ballistic transport) in small structures, and alternative device structures for VLSI. Prerequisites: 216 or equivalent. Recommended: EE 212.
EE 323 examines energy in modern nanoelectronics, from fundamentals to systems. Fundamental topics include energy storage and transfer via electrons and phonons, ballistic limits of current and heat, meso- to macroscale mobility and thermal conductivity. Applied topics include power in nanoscale devices (1D nanotubes and nanowires, 2D materials, 3D silicon CMOS, resistive memory and interconnects), circuit leakage, temperature measurements, thermoelectric energy conversion, and thermal challenges in densely integrated systems. Basic knowledge of semiconductors, transistors, and Matlab (or similar) are recommended.
Miniaturization technologies now have important roles in materials, mechanical, and biomedical engineering practice, in addition to being the foundation for information technology. This course will target an audience of first-year engineering graduate students and motivated senior-level undergraduates, with the goal of providing an introduction to M/NEMS fabrication techniques, selected device applications, and the design tradeoffs in developing systems. The course has no specific prerequisites, other than graduate or senior standing in engineering; otherwise, students will require permission of the instructors.
This project course focuses on developing fabrication processes for ExFab, a shared facility that supports flexible lithography, heterogeneous integration, and rapid micro prototyping. Team projects are approved by the instructor and are mentored by an SNF staff member and an external mentor from industry. Students will plan and execute experiments and document them in a final presentation and report, to be made available on the lab's Wiki for the benefit of the Stanford research community. Students must consult with Prof. Fan, SNF staff, and an external mentor, and also need to submit an approved proposal before signing up.
Fundamentals and application of laboratory techniques to study the diversity and activity of microorganisms in environmental samples, including soil, sediment, and water. Emphasis is on culture-independent approaches, including epifluorescence microscopy, extraction and analysis of major biomolecules (DNA, RNA, protein, lipids), stable isotope probing, and metabolic rate measurements. Format will include lectures, laboratory exercises, and discussions. Students will learn how to collect, analyze, and understand common and cutting-edge datasets in environmental microbiology. Permission from instructor is required to enroll as C/NC or for 1-3 units.
Enroll in this class to explore the intriguing link between materials science and culinary. Through the lens of the materials science tetrahedron, we will uncover how nano- and micro- structures along with processing techniques shape the textures and appearances of everyday foods. We will delve into the science behind culinary phenomena, like appearances of blooms on aged chocolate, the glossy finish on perfectly tempered chocolate, the icy texture of freezer-burned ice cream, and the crunchy lucky-charm-like texture of marshmallows. With the understanding of materials science, we will examine how your skills in the kitchen can be improved. How, exactly, can you avoid ruining a perfectly soft ice cream with freezer burns? In this course, you will also learn how to describe and analyze edible materials with relevant technical terms. Come with an open mind and a dash of creativity. Let us discover the fascinating science hidden in your kitchen together.
This course introduces the theory and application of characterization techniques used to examine the atomic structure of materials. Students will learn to classify the structure of materials such as semiconductors, ceramics, and metals according to the principles of crystallography. Characterization methods commonly used in academic and industrial research, including X-ray diffraction and electron microscopy, will be demonstrated along with their application to the analysis of nanostructures. Prerequisites: ENGR 50 or equivalent introductory materials science course.
From early church architectures through modern housing, windows are passages of energy and matter in the forms of light, sound, and air. By letting in heat during the summer and releasing it in the winter, windows can place huge demands on air conditioning and heating systems, thereby increasing energy consumption and raising greenhouse gas levels in the atmosphere. Latest advances in materials science have enabled precise and on-demand control of electromagnetic radiation through 'smart' dynamic windows with photochromic and electrochromic materials that change color and optical density in response to light radiance and electrical potential. In this course, we will spend the whole quarter on a project to make and characterize dynamic windows based on a representative electrochromic material system, the reversible electroplating of metal alloys. There will be an emphasis in this course on characterization methods such as scanning electron microscopy (SEM), x-ray photoelectron spectroscopy (XPS), optical spectroscopy, four-point probe measurements of conductivity, and electrochemical measurements (cyclic voltammetry). Prerequisites: MATSCI 156 Corequisites: MATSCI131 (Contact the instructor if you would like to enroll without completion of the stated prerequisites. A permission code will be provided with instructor approval)
This course introduces students to experimental techniques widely used in both industry and academia to characterize the mechanical properties of engineering materials. Students will learn how to perform tensile testing and nanoindentation experiments and how they can be used to study the mechanical behavior of several materials including metals, ceramics, and polymers. Through our laboratory sessions, students will also explore concepts related to materials fabrication and design, data analysis, performance optimization, and experimental decision-making. Enrollment is limited to 20. Prerequisites: MATSCI 151 or consent of instructor. Undergraduates register for 163 for 4 units, Graduates register for 173 for 3 units. Corequisites: MATSCI131 (Contact the instructor if you would like to enroll without completion of the stated prerequisites. A permission code will be provided with instructor approval)
Image formation and interpretation. The contrast phenomena associated with perfect and imperfect crystals from a physical point of view and from a formal treatment of electron diffraction theory. The importance of electron diffraction to systematic analysis and recent imaging developments. Recommended: 193/203, 195/205, or equivalent.
The science and technology of microanalytical techniques will be discussed. We consider ways to characterize the structural, compositional, morphological, electronic, optical, mechanical, and magnetic properties of surfaces and interfaces. We will talk about different types of surface analytical techniques that rely on the use of electrons, photons, ions, and sharp tips to learn about different aspects about surfaces. We also discuss strategies on how to combine such techniques to gain a more complete and quantitative picture of a surface. We will also describe the inner workings and design of the hardware involved in analyzing surfaces. *Prerequisite: some prior exposure to atomic and electronic structure of solids.